| 摘要 |
PURPOSE:To enable the laser beam in high output to be oscillated stably by a method wherein spare ionization electrodes are constituted taking the sections into almost T-shape so as to be hardly damaged. CONSTITUTION:Before discharging by a main electrode, spare ionization electrodes 10 are abruptly impressed with a pulse voltage from peaking capacitors 5 while spark discharge occurs in the gaps made between upper and lower electrodes 10 to irradiate the main discharge space with ultraviolet rays. The ends of the electrodes 10 are taken into almost T-shape so that the surface spaces in the discharging regions may be expanded to decrease the current density for preventing the ends of the electrodes 10 from damaging. Through these procedures, an oscillator oscillating laser beams in high output stably for a long time can be manufactured. |
