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发明名称
MAGNETIC BEARING TURBO MOLECULAR DRAG PUMP
摘要
申请公布号
JPH02252996(A)
申请公布日期
1990.10.11
申请号
JP19890072100
申请日期
1989.03.24
申请人
SHIMADZU CORP
发明人
IGAWA AKIO
分类号
F04D27/00;F04B49/10;F04D19/04;F16C32/04
主分类号
F04D27/00
代理机构
代理人
主权项
地址
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