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发明名称
ZWEI-SCHICHTEN-PHOTOLACK-VERFAHREN MIT DECKSCHICHT.
摘要
申请公布号
DE3764702(D1)
申请公布日期
1990.10.11
申请号
DE19873764702
申请日期
1987.02.17
申请人
INTERNATIONAL BUSINESS MACHINES CORP., ARMONK, N.Y., US
发明人
LYONS, CHRISTOPHER FRANCIS, LAGRANGEVILLE NEW YORK 12540, US
分类号
G03F7/26;G03F7/095;G03F7/38;G03F7/40;(IPC1-7):G03F7/38
主分类号
G03F7/26
代理机构
代理人
主权项
地址
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