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发明名称
DOPANT DIFFUSION IN SEMICONDUCTOR DEVICES
摘要
申请公布号
GB2230135(A)
申请公布日期
1990.10.10
申请号
GB19890007611
申请日期
1989.04.05
申请人
* N.V. PHILIPS' GLOEILAMPENFABRIEKEN
发明人
HENRICUS GODEFRIDUS RAFAEL * MAAS;JOHANNES WILHELMUS ADRIANUS * VAN DER VELDEN;ROLAND ARTHUR * VAN ES
分类号
H01L29/73;H01L21/225;H01L21/28;H01L21/285;H01L21/3215;H01L21/331
主分类号
H01L29/73
代理机构
代理人
主权项
地址
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