发明名称 Extended length trench resistor and capacitor.
摘要 <p>A resistive element (10) and method for constructing the same is provided which includes a trench (12) formed in an underlying layer (14). A resistive layer (26) is formed within trench (12) and separated therefrom by an insulating layer (24). Tabs (30,32) may be formed at the ends (44,46) of resistive layer (26). An insulating region (38) may be formed in either void area (27) or (36). A capacitance may also be realized where the underlying layer (14) is a conductor thereby enclosing a dielectric (insulating layer (24)) between itself and resistive layer (26).</p>
申请公布号 EP0391123(A2) 申请公布日期 1990.10.10
申请号 EP19900105225 申请日期 1990.03.20
申请人 TEXAS INSTRUMENTS INCORPORATED 发明人 HAVEMANN, ROBERT, H.;EKLUND, ROBERT H.
分类号 H01L27/04;H01L21/02;H01L21/334;H01L21/70;H01L21/822 主分类号 H01L27/04
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