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发明名称
DRY ETCHING PROCESS AND APPARATUS
摘要
申请公布号
EP0168768(B1)
申请公布日期
1990.10.10
申请号
EP19850108588
申请日期
1985.07.10
申请人
HITACHI, LTD.
发明人
TSUJII, KANJI;YAJIMA, YUSUKE;MURAYAMA, SEIICHI
分类号
H01J37/32;H01L21/3065
主分类号
H01J37/32
代理机构
代理人
主权项
地址
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