HIGHLY PURE TITANIUM AND THE METHOD

摘要

Highly pure titanium contains less than 200 ppm oxygen, less than 30 ppm each of Fe, Ni and Cr and less than 0.1 ppm each of Na and K. The pure metal has a residual resistance ratio RRR273 of 45 or more. Pref. the metal contains less than 0.001 ppm of uranium and thorium. The metal can be readily produced by subjecting the pure metal obtained dry electrolysis to electron beam refining. It can be used to fabricate wiring networks for semiconductor devices.