SEIDENKANOSHUSEKINYOTSUTESHOJIRUSHOGAIOSAKERUKINOGAHYOMENNOTAIDENNYOTSUTESONNAWARERU*KINZOKUZAIRYOKARANARUKOZOBUZAI

摘要

The invention relates to a structural member made from a metallic material having an upper surface exposed to dangers of electric charge accumulations during operation in an apparatus such as a high vacuum apparatus operating with a charge carrying beam wherein the upper surface is formed with a conductive or semiconductive compound of the metallic material which is also present in the body of the structural member and is in electrical contact with the body of the structural member, thereby preventing undesirable charge accumulation on the surface.