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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH02250317(A)
申请公布日期
1990.10.08
申请号
JP19890073531
申请日期
1989.03.23
申请人
MATSUSHITA ELECTRON CORP
发明人
ODA SUSUMU;MATSUMOTO MITSUHIRO;OSAKABE AKIHIKO;HIROSE KEIJI
分类号
H01L21/28
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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