| 摘要 |
<p>PURPOSE:To contrive the improvement in yield by preventing the collet flow due to die-bonding and pellet arrangement after separation by holding a pellet by suction in a stable state by a collet which has been waiting above the pellet so as to prevent the shift of the pellet from its position in the collet. CONSTITUTION:This device is provided with a suction nozzle 1 made of a ceramic or metallic porous material 2 including innumerable voids, which has surfaces inclined by, for example 3 at its top. In the center of the nozzle, a needle 4 can move up and down, thereby opening a nozzle suction aperture 12 for holding a sheet 7. In this case, while the whole surface of the suction nozzle 1 holds the sheet 7 uniformly from the backside of the sheet of the pellet 6 which is perfectly cut and divided into individual pieces on the sheet 7, a collet 5 having a collet suction aperture 8 is kept waiting about 1mm above the pellet 6, and the needle 4 pushes up the pellet 6 from the backside of the sheet so that the collet 5 holds the pellet 6 and the pick-up operation is done. Thus, the yield can be improved.</p> |
