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发明名称
SEMICONDUCTOR DEVICE, PASTED SUBSTRATE AND ITS MANUFACTURE
摘要
申请公布号
JPH02250329(A)
申请公布日期
1990.10.08
申请号
JP19890070614
申请日期
1989.03.24
申请人
HITACHI LTD
发明人
KANAI AKIRA;SAIDA HIROJI;UMEMURA NOBUAKI
分类号
H01L21/20;H01L21/322
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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