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发明名称
BATSUCHISHIKISHINKUJOCHAKUSOCHOJOHATSUGENSHUNOSOCHI
摘要
申请公布号
JPH0244900(B2)
申请公布日期
1990.10.05
申请号
JP19850167510
申请日期
1985.07.31
申请人
ULVAC CORP
发明人
KATO TAKEO;SUNAGA YOSHIO
分类号
C23C14/24;F16B35/00
主分类号
C23C14/24
代理机构
代理人
主权项
地址
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