| 摘要 |
PURPOSE:To learn the number of compounds containing two elements and an element content ratio accurately based on the number and positions of information groups appearing in a correlation chart which is produced by converting the results in the measurement of characteristic X rays of two elements of two-element compounds into a brightness value of respective image information. CONSTITUTION:A microscopic range of a sample is scanned by an electron beam to determine an intensity of energy of characteristic X rays in terms of elements from a matrix detection point and the intensity of energy is stored into a memory corresponding to the detection point according to address. The results in the measurement of the intensity of energy are converted into a brightness value of image information to prepare a histogram of a brightness value for respective elements. When a correlation chart of image brightness values of characteristic X rays of Ca and Mg is generated, for example, on a matrix screen of a CRT, information groups G1, G2 and G3 appear at a location where a ratio is almost equal between image brightness values of two elements. Thus, three types, not two, of compounds of the Ca and Mg are found to exist from three in the number of groups and an element content ratio is learned accurately from position coordinates of the groups. |
