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发明名称
SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
摘要
申请公布号
JPH02151042(A)
申请公布日期
1990.06.11
申请号
JP19880304110
申请日期
1988.12.02
申请人
HITACHI LTD
发明人
MORI MITSUHIRO;YANOKURA EIJI;TAKAHASHI SUSUMU
分类号
H01L29/812;H01L21/338
主分类号
H01L29/812
代理机构
代理人
主权项
地址
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