| 摘要 |
PURPOSE:To improve a wire bonding device of this design in bonding speed by a method wherein a light volume controlling light bulb composed of a polarizer, a transparent ferroelectric, and an analyzer is provided between a light source and an irradiation object. CONSTITUTION:A lamp 1 serving as a light source is fitted to a holder 2 so as to make its optical path coincident with the axis of the holder 2. The lamp 1 is connected to a lighting power source 3 through the intermediary of a lead wire. A polarizer 4, a transparent ferroelectric 5, an analyzer 6, and a lens 8 are successively arranged on the holder 2 in this sequence from the lamp 1. The polarizer 4 and the analyzer 6 are arranged deviating from each other in phase by an angle of 90 deg. of rotation to an optical axis. An electrode 7 is provided to the transparent ferroelectric 5, and a light volume is controlled in such a manner that the output of a pulse power source 9 is applied to the electrode 7 as it is varied by the control signal sent from a control circuit 10. By this setup, a wire bonding device can be improved in operating speed. |
