发明名称 |
METHOD OF DRAWING-UP A SINGLE CRYSTAL USING A DOUBLE-CRUCIBLE APPARATUS AND DOUBLE-CRUCIBLE APPARATUS THEREFOR |
摘要 |
A method and apparatus for drawing up a single crystal using a double-crucible apparatus and a liquid capsule process. The inner crucible of the double-crucible apparatus is attached to the outer crucible. The presence of through holes in the lower portions of the inner crucible allow communication between the molten raw material in the inner and outer crucibles. Through holes in the upper portion of the inner crucible allow communication between the liquid sealing agent covering the molten raw material in the inner and outer crucibles. Single crystals having uniform impurity concentration and few defects are rapidly grown because the interface between the liquid sealing agent and molten raw material in the inner crucible is even with the same interface in the outer crucible. |
申请公布号 |
EP0226794(B1) |
申请公布日期 |
1990.10.03 |
申请号 |
EP19860115638 |
申请日期 |
1986.11.11 |
申请人 |
SUMITOMO ELECTRIC INDUSTRIES LIMITED |
发明人 |
KAWASAKI, AKIHISA C/O OSAKA WORKS |
分类号 |
C30B15/12;C30B27/02;H01L21/18;H01L21/208 |
主分类号 |
C30B15/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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