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发明名称
METHOD AND APPARATUS FOR ALIGNING SOLDER BALLS
摘要
申请公布号
EP0307591(A3)
申请公布日期
1990.10.03
申请号
EP19880112127
申请日期
1988.07.27
申请人
HITACHI, LTD.
发明人
FUKASAWA, HIDEYUKI;KOBAYASHI, MAMORU;WANAMI, MASAHIRO
分类号
H01L21/48;H01L21/60;H05K3/34;(IPC1-7):H01L21/60
主分类号
H01L21/48
代理机构
代理人
主权项
地址
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