| 摘要 |
PURPOSE:To obtain the central part material of tacky material preventing dust in the interior of pelicle during manufacturing, transportation, preservation and also long-term use by leaving the inner face side of pelicle of a central part material of tacky material for pelicle, comprising an elastic material, in a molded and processed surface as it is. CONSTITUTION:For example, an elastic material (e.g. urethane resin foam) is used as a central part material of tacky material for frame, an inner face side of pelicle thereof is left in a molded and processed surface as it is, the tacky material is provided with a double coated adhesive tape, bonded to the frame and the outside of the pelicle is cut to give the aimed central part material of tacky material. The central material is added to a photomask (reticule). A tacky material can be bonded to a frame and a photomask, etc., without gap by providing the central material with elasticity. |
