Apparatus for manufacturing silicon single crystals.

摘要

A Chochralski method-type silicon single crystal manufacturing apparatus including a feeding device for continuously feeding granular silicon starting material into a crucible. The apparatus comprises a silicon single crystal manufacturing apparatus having a continuous granular silicon starting material feeding device including a housing (11) containing a reduced-pressure inert gas atmosphere, a rotating cylinder (14) arranged inside the housing (11) and having a plurality of granule catch portions (15) on its outer peripheral surface and a storage hopper (12) arranged above the rotating cylinder (14). The feeding device is so arranged that the distance (gap) between the lower discharge port end (13) of the storage hopper (12) and the outer peripheral surface is greater than the maximum diameter of the granular silicon and the distance (gap) has the maximum value sufficient to cause the granular silicon to accumulate with an angle of repose at the distance (gap). The granule catch portions (15) on the outer peripheral surface of the rotating cylinder (14) take the form of any of various kinds of projections or grooves.