METHOD AND DEVICE FOR LASER INTERFERENCE LENGTH MEASUREMENT,申请号JP19890068060-传众专利搜索

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发明名称	METHOD AND DEVICE FOR LASER INTERFERENCE LENGTH MEASUREMENT
摘要
申请公布号	JPH02247502(A)	申请公布日期	1990.10.03
申请号	JP19890068060	申请日期	1989.03.20
申请人	KEYENCE CORP	发明人	AKISHIBA YUUJI;HIRAI MAKOTO;NISHIOKA KEIICHI;IMAYADO TAKANORI
分类号	G01B9/02	主分类号	G01B9/02
代理机构		代理人
主权项
地址

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