发明名称 |
Device for cleaning in particular of disc-shaped oxide substrates |
摘要 |
A method and a device for cleaning in particular of oxide substrates is proposed, the substrates being extracted from a quantity of extremely pure water after pre-cleaning. The temperature of the substrate and the extraction velocity from the water are so selected that a water film extending from the water surface runs off evenly.
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申请公布号 |
US4960141(A) |
申请公布日期 |
1990.10.02 |
申请号 |
US19880249986 |
申请日期 |
1988.09.27 |
申请人 |
NUKEM GMBH |
发明人 |
LENCK, NORBERT;WOERNER, JOERG |
分类号 |
B08B3/04;B08B11/04;H01L21/00;H01L21/304;(IPC1-7):B08B7/04 |
主分类号 |
B08B3/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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