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发明名称
VORRICHTUNG ZUM DIREKTEN BEHEIZEN EINES SUBSTRATTRAEGERS
摘要
申请公布号
DE4011460(A1)
申请公布日期
1991.10.10
申请号
DE19904011460
申请日期
1990.04.09
申请人
LEYBOLD AG, 6450 HANAU, DE
发明人
GEGENWART, RAINER, DR., 6074 ROEDERMARK, DE;KATZSCHNER, WERNER, 8752 KLEINKAHL, DE;LORENZ, GERHARD, 8755 ALZENAU, DE;STOLL, HELMUT, 6231 SULZBACH, DE
分类号
C23C16/48;C23C14/54;C23C16/46;C23F4/00;H01L21/205
主分类号
C23C16/48
代理机构
代理人
主权项
地址
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