| 摘要 |
PURPOSE:To decompose the fine particles of dust to hyperfine particles and to prevent the defect arising from the dust by providing an optical system which forms the ray film by the laser light from a laser light source in a vacuum or gas space where the treatment of a material to be treated is executed. CONSTITUTION:The laser light beam LB projected from the laser light source 1 is made incident to the position apart from the center of a cylinder into, for example, a cylindrical optical system 3, the inside surface of which is formed as a reflecting mirror surface, in the direction perpendicular to the cylinder axis. The LB reflects successively on the reflecting mirror surface 2 within the optical system and forms the LB ray film 4 in the direction perpendicular to the axial direction within this region. The fine particles 5 consisting of metals, compds., ore, etc., are ground and evaporated by receiving the energy of the LB at the time of passing the LB film 4 when the above-mentioned particles are made incident into such region by the falling movement by gravity, Brownian movement, etc., as shown by an arrows 6. The particles are thereby decomposed to single crystals or the hyperfine particles 7 of several nm. The fine particles of the dust are decomposed to the hyperfine particles in this way, by which the number of the fine particles of such a size as to generate the pollution hazards is decreased and the product yield and reliability of semiconductor devices are improved. |
