发明名称 GAS LASER OSCILLATOR
摘要 PURPOSE:To hold gas pressure in a gear chamber constant, to reduce oil mist, to enhance reliability and to stably process by providing a gear chamber solenoid valve for holding the gas pressure constant and a gear chamber gas pressure sensor for detecting the gas pressure in the chamber. CONSTITUTION:A gear chamber solenoid valve 20 for maintaining gas pressure in a gear chamber 9a of a blower 9 constant and a gear chamber gas pressure sensor 21 for detecting the gas pressure in the chamber 9a are provided, and the valve 20 is controlled according to a signal of the sensor 21 by an automatic controller 19. That is, the valve 20 can be controlled from the signal of the sensor 21 by the controller 19 to maintain the gas pressure in the gear chamber of the blower constant. Thus, flowout of oil mist from the chamber 9a is suppressed to a minimum limit, and a stable gas laser oscillator having high reliability is obtained.
申请公布号 JPH02246389(A) 申请公布日期 1990.10.02
申请号 JP19890068846 申请日期 1989.03.20
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 MOTOMIYA HITOSHI;YAMANE SHIGEKI
分类号 H01S3/097;H01S3/036 主分类号 H01S3/097
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