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发明名称
APPLICATOR
摘要
申请公布号
JPH02245265(A)
申请公布日期
1990.10.01
申请号
JP19890065475
申请日期
1989.03.17
申请人
TOKYO ELECTRON LTD;TERU KYUSHU KK
发明人
IWAMA TATSUYUKI;YOSHIMURA SEIJI
分类号
B05C11/08;H01L21/027;H01L21/30
主分类号
B05C11/08
代理机构
代理人
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地址
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