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发明名称
WIRING STRUCTURE OF SEMICONDUCTOR DEVICE AND FORMATION THEREOF
摘要
申请公布号
JPH02246159(A)
申请公布日期
1990.10.01
申请号
JP19890067140
申请日期
1989.03.18
申请人
OKI ELECTRIC IND CO LTD
发明人
YOKOYAMA TAKESHI
分类号
H01L29/78;H01L21/28;H01L21/336;H01L29/43
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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