| 摘要 |
<p>PURPOSE:To directly recover a fluorocarbon-based solvent, etc., by providing a heat exchanger for heating a low-level vapor above a vapor line of a cleaning tank and furnishing a heat exchanger for absorbing heat from the low-level vapor in a pocket formed thereon. CONSTITUTION:The heat exchanger 22 for heating a low-level vapor is provided above the vapor line of the cleaning tanks 12-14. The pocket 23 surrounding the cleaning tanks 12-14 is formed thereon, and the heat exchanger 24 for absorbing heat from the low-level vapor is furnished in the pocket 23. As a result, the fluorocarbon-based solvent or low-boiling-point solvent are not dispersed from the insides of the cleaning tanks, and directly recovered in the cleaning device.</p> |
