| 摘要 |
PURPOSE:To manage treatment liquid property by performing treatment concerned with discharge of treatment liquid and new supply only when it detected that the temperature difference between the temperature of the treatment liquid before starting the treatment and the temperature of the treatment liquid after having started the treatment has passed the specified value. CONSTITUTION:The CPU8a reads in liquid temperature data A, which shows the temperature of peeling liquid 2, from a temperature sensor 5 for deterioration detection, and makes a memory store them. At this stage, a substrate is not put in the peeling liquid in a treatment vessel 1, and is in the conditions before dissolving a photoresist. After the substrate is put in the peeling liquid 2 of the treatment vessel 1, the CPU8a reads in liquid temperature data B, which shows the temperature of the peeling liquid 2, from the temperature sensor 5 for deterioration detection, and makes a memory store them. The CPU8a reads out liquid temperature data A and B from the memory and judges whether the temperature difference (B-A) between both is larger than the preset constant K. When the temperature difference (B-A) between both is larger than the preset constant K, it judges that the peeling liquid K is active, and that it is still usable, and it does not open a solenoid valve 6. |
