| 摘要 |
PURPOSE: To make a biosensor device suitable for multiply analysis by providing an electric conductor to be separated on the surface of a support in contact when substance to be analyzed exists in a reactive cell. CONSTITUTION: A silicon chip 1 is placed on a header package 2, and connected to the package 1 by eutectic solder composition. The device 8 of the chip 1 is fixed to a device pad 9 and the head of a pin 4 by using gold wirings 3, and the wirings 3 are encapsulized by epoxy resin 7. The three devices 8 are provided on the chip 1 via a pair of parallel electric conductors. Silicon substrate substance formed of the chip 1 has the surface layer 11 of silicon dioxide of electrically insulating substance formed on the upper surface to support an electric conductor region 12. The space between the conductors specifies a reactive cell. When the substance 14 exists here, its electric or thermal characteristics are detected. |
