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发明名称
DRYETCHING PROCESS
摘要
申请公布号
JPH02244625(A)
申请公布日期
1990.09.28
申请号
JP19890064086
申请日期
1989.03.16
申请人
SONY CORP
发明人
KADOMURA SHINGO
分类号
H01L21/302;H01L21/027;H01L21/30;H01L21/3065
主分类号
H01L21/302
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代理人
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