ELECTROSTATIC CHUCK COATED WITH DIAMOND

摘要

PURPOSE: To provide an electrostatic chuck for holding a wafer which exhibits large durability in several environments, such as a high-temperature environment and a corrosive chemical environment. CONSTITUTION: An electrostatic chuck 10 includes a molybdenum-made body 14 which is large enough to support a semiconductor wafer 12. This body is coated with a 1st diamond layer 20 of 0.1 to 5.0μm. On this 1st diamond layer, a couple of molybdenum-made electrodes 22A and 22B in nearly flat shapes are formed. A 2nd diamond layer 44 which is almost as thick as the 1st diamond layer is formed uniformly in such a manner as covering the couple of electrodes. A voltage is applied between the couple of electrodes to generate an electrostatic force, thereby attracting and holding the wafer on the surface of the 2nd diamond layer.