MANUFACTURE OF SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE,申请号JP19890063892-传众专利搜索

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发明名称	MANUFACTURE OF SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要
申请公布号	JPH02244738(A)	申请公布日期	1990.09.28
申请号	JP19890063892	申请日期	1989.03.17
申请人	HITACHI LTD	发明人	KAWAJI MOTONORI
分类号	H01L29/73;H01L21/314;H01L21/331;H01L21/76;H01L21/762;H01L29/732;H01L29/737;H01L29/78;H01L29/786	主分类号	H01L29/73
代理机构		代理人
主权项
地址

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