| 摘要 |
PURPOSE:To increase a gas laser oscillation in frequency without the reduction in energy per pulse by a method wherein one of discharge electrodes is a rotary discharge electrode, a rotary vane and the rotary discharge electrode are formed into an integral structure, and a pulse discharging voltage is applied between the discharge electrode in synchronism with the rotation. CONSTITUTION:Rotary vanes 30 are formed of insulator, whose tips pass near the discharge face of a stationary discharge electrode 10. Guide plates 33 are provided near the tip of the rotary vane 30 wedging between pre-discharge gaps 6. An angle detector is provided to a shaft 21 of the rotary discharge electrode 20, a switch 4 is turned ON as many times per revolution of the electrode 20 as the number of the rotary vanes 30 to enable a pulse discharge to take place between the electrode 10 and 20. Gas between two vanes 30 including a discharge space is sent in the direction of a circulation path CP with the rotation of the electrode 20, high temperature gas inside the discharge space is replaced with low temperature gas between the following two vanes 30, and the high temperature gas is cooled by a heat exchanger 60. By this constitution, a pulse laser oscillation can be repeated constantly outputting laser rays of high intensity. |
