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发明名称
TRANSPORT DEVICE FOR SEMICONDUCTOR MATERIAL
摘要
申请公布号
JPH02243417(A)
申请公布日期
1990.09.27
申请号
JP19890062854
申请日期
1989.03.15
申请人
NEC CORP
发明人
KONNO HIDEKAZU
分类号
B65G49/00
主分类号
B65G49/00
代理机构
代理人
主权项
地址
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