| 摘要 |
PURPOSE:To maintain the high cleanliness by reducing the number of workers who shift between devices by forming a pedestrian deck by installing the second floor having air permeability between an underfloor and a floor having air permeability. CONSTITUTION:The second grating floor 13 is installed between the first grating floor 2 and an underfloor 1, and used as a pedestrian deck for workers 12 under the floor. Further, an inlet/outlet 14 which can be freely opened and closed and a ladder 15 are installed in the working area 7 of the first grating floor 2. The clean air which is blown into the working area 7 and a device region 9 by a fan 11 is introduced into an underfloor space 3 through the second grating floor 13, and then returned into the fan 11 from a Preservation area 6 through the second and first grating floors 13 and 2. Therefore, even if dust are formed by the passing of workers 12, the contaminated air is not returned into the working region 7 and the device region 9, and the cleanliness of the air can be maintained. |
