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发明名称
ELECTRODE STRUCTURE
摘要
申请公布号
JPH02243760(A)
申请公布日期
1990.09.27
申请号
JP19890030648
申请日期
1989.02.08
申请人
TOKYO ELECTRON LTD
发明人
KUBO KENICHI
分类号
H05H1/24;C23C14/34;H01J35/10;H01L21/203
主分类号
H05H1/24
代理机构
代理人
主权项
地址
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