发明名称 POSITIONING DEVICE FOR WAFER TRANSPORT
摘要 <p>PURPOSE:To improve the precision of positioning at the above device for a crystal wafer or the like by providing respectively a plurality of respective tip and side vacuum holes and reverse transport air holes at part of a transport rail having an air cylinder operation stopper, transport air holes, fixing vacuum holes and the like. CONSTITUTION:When it is confirmed that positioning is not correct, by means of positioning confirmation sensors 13-15 and a wafer passing detection sensor 16, a fixing vacuum 19 is, first, released, and a reverse transport air 22 is blown off through reverse transport air holes 8, and a wafer 2 is moved back a little from a stopper 4. Next, the reverse transport air 22 is released, and a transport air is blown off through transport air holes 3, and the wafer 2 is made to move floatingly in a stopper 4 direction, and suction is made by means of tip vacuum holes 6 and side vacuum holes 7, and in addition, suction and fixation are made by means of fixing vacuum holes 5, and positioning has been again conducted.</p>
申请公布号 JPH02243418(A) 申请公布日期 1990.09.27
申请号 JP19890063162 申请日期 1989.03.15
申请人 SEIKO INSTR INC 发明人 MOCHII SEIJI
分类号 B65G51/03;H01L21/677;H01L21/68 主分类号 B65G51/03
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