MULTIPLE CHAMBER DEPOSITION AND ISOLATION SYSTEM AND METHOD

摘要

A system for depositing a body of material upon a substrate the body having at last two layers of different composition, the system comprising: a first chamber (14) including means for depositing a first layer of material on the substrate; first source means for providing the first chamber with a first plurality of gases; a second chamber (16) including means for depositing a second layer of material on the substrate, the second layer of material having a composition differing from the composition of the first layer by the absence of at least one element.