| 摘要 |
The invention relates to a method for determining the refractive index and layer thickness of ultrathin layers. …<??>In order to determine the refractive index and/or thickness of layers having layer thicknesses 1 mu m, layers which are applied to a solid substrate are recorded by means of surface/plasmon microscopy as a function of the angle of incidence of the irradiating laser beam. …<??>It is possible in this way to determine layer thicknesses with a vertical resolution >/= 0.1 nm in conjunction with simultaneous lateral resolution >/= 5 mu m. |
