| 摘要 |
PURPOSE:To fix the composition and deterioration degree of a processing soln. by sampling the soln. in a treating vessel, as required, measuring the absorbance and titrating the sampled soln. to detect the deterioration degree and concn. of the soln. CONSTITUTION:The processing soln. (e.g. resist removing soln.) is sampled from the treating vessel at appropriate time intervals and introduced into a photocell 2 through a filter 1, and the absorbance of the passing soln. is measured by a floodlight 2a and a light receiver 2b to detect the deterioration degree. The soln. is then introduced into an overflow 3, sucked by a sampling burette 7 and sent into analytical cells 8A and 8B in a specified amt. Meanwhile, specified amts. of the liq. chemicals in liq. chemical tanks 9C and 9D are supplied to the cells 8A and 8B by bumps 11A and 11B for liq. feeding. The titrants in liq. chemical vessels 9A and 9B sucked into the titration burettes 10A and 10B and gradually added to the cells 8A and 8B to carry out titration. The end of titration is detected by ORP electrodes 13A and 13B, and the composition of the soln. is detected by the amt. of the titrant dripped. |
