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发明名称
摘要
申请公布号
JPH0243203(B2)
申请公布日期
1990.09.27
申请号
JP19780116170
申请日期
1978.09.20
申请人
发明人
分类号
H01L29/78;G05F3/16;G05F3/24
主分类号
H01L29/78
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