发明名称 Nitride removal method.
摘要 <p>A method for removing nitride coatings from metal tooling and mold surfaces without damaging the underlying base metal includes placing the nitride coated metal surface into a plasma reactor and subjecting it to a gaseous plasma comprising a reactive fluorine species. The reactive fluorine species may be derived from one or more of many well known gases. An optional step of cleaning the nitride coating is recommended.</p>
申请公布号 EP0388749(A1) 申请公布日期 1990.09.26
申请号 EP19900104635 申请日期 1990.03.12
申请人 MOTOROLA INC. 发明人 KNAPP, JAMES HOWARD;CARNEY, GEORGE FRANCIS;CARNEY, FRANCIS JOSEPH
分类号 C23C16/34;B23K10/00;C23F4/00;C23G5/00 主分类号 C23C16/34
代理机构 代理人
主权项
地址