发明名称 |
Nitride removal method. |
摘要 |
<p>A method for removing nitride coatings from metal tooling and mold surfaces without damaging the underlying base metal includes placing the nitride coated metal surface into a plasma reactor and subjecting it to a gaseous plasma comprising a reactive fluorine species. The reactive fluorine species may be derived from one or more of many well known gases. An optional step of cleaning the nitride coating is recommended.</p> |
申请公布号 |
EP0388749(A1) |
申请公布日期 |
1990.09.26 |
申请号 |
EP19900104635 |
申请日期 |
1990.03.12 |
申请人 |
MOTOROLA INC. |
发明人 |
KNAPP, JAMES HOWARD;CARNEY, GEORGE FRANCIS;CARNEY, FRANCIS JOSEPH |
分类号 |
C23C16/34;B23K10/00;C23F4/00;C23G5/00 |
主分类号 |
C23C16/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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