METHOD FOR EVALUATING THE BREAKDOWN TIME OF AN INSULATING FILM,申请号EP19860307528-传众专利搜索

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发明名称	METHOD FOR EVALUATING THE BREAKDOWN TIME OF AN INSULATING FILM
摘要
申请公布号	EP0219266(B1)	申请公布日期	1990.09.26
申请号	EP19860307528	申请日期	1986.10.01
申请人	SEIKO INSTRUMENTS INC.	发明人	HIRAI, YOSHIO
分类号	G01R31/12;H01L21/66;H01L21/31	主分类号	G01R31/12
代理机构		代理人
主权项
地址

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