发明名称 Light-sensitive composition.
摘要 Light-sensitive compositions composed of a polymer and a photoactive component meet the requirements relating to photoresists to a high degree if the polymer contains carboxylic anhydride groups or phenolic hydroxyl groups and the photoactive component is an N-alkylated or N-arylated 1,4-dihydropyridine or 1,4-dihydropyridine derivative of the following structure: <IMAGE> where the radical R is a (substituted) aryl radical which has an NO2 group in the ortho-position with respect to the bond to the dihydropyridine ring and R3 is alkyl, cyclohexyl or phenyl.
申请公布号 EP0388482(A1) 申请公布日期 1990.09.26
申请号 EP19890104948 申请日期 1989.03.20
申请人 SIEMENS AKTIENGESELLSCHAFT 发明人 KUEHN, EBERHARD;HAMMERSCHMIDT, ALBERT, DR. DIPL.-CHEM.;SCHMIDT, ERWIN;AHNE, HELLMUT, DR. DIPL.-CHEM.
分类号 G03F7/038;C08K5/3432;C08L101/00;G03F7/004;G03F7/26;H01L21/027;H01L21/30 主分类号 G03F7/038
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