发明名称 |
Light-sensitive composition. |
摘要 |
Light-sensitive compositions composed of a polymer and a photoactive component meet the requirements relating to photoresists to a high degree if the polymer contains carboxylic anhydride groups or phenolic hydroxyl groups and the photoactive component is an N-alkylated or N-arylated 1,4-dihydropyridine or 1,4-dihydropyridine derivative of the following structure:
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where the radical R is a (substituted) aryl radical which has an NO2 group in the ortho-position with respect to the bond to the dihydropyridine ring and R3 is alkyl, cyclohexyl or phenyl.
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申请公布号 |
EP0388482(A1) |
申请公布日期 |
1990.09.26 |
申请号 |
EP19890104948 |
申请日期 |
1989.03.20 |
申请人 |
SIEMENS AKTIENGESELLSCHAFT |
发明人 |
KUEHN, EBERHARD;HAMMERSCHMIDT, ALBERT, DR. DIPL.-CHEM.;SCHMIDT, ERWIN;AHNE, HELLMUT, DR. DIPL.-CHEM. |
分类号 |
G03F7/038;C08K5/3432;C08L101/00;G03F7/004;G03F7/26;H01L21/027;H01L21/30 |
主分类号 |
G03F7/038 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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