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经营范围
发明名称
PROBE UNIT
摘要
申请公布号
JPH02242165(A)
申请公布日期
1990.09.26
申请号
JP19890060953
申请日期
1989.03.15
申请人
HITACHI LTD
发明人
TAKEUCHI SHIGERU
分类号
G01R31/26;G01R1/067;G01R1/073;H01L21/66
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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