Active matrix type liquid crystal display device and method of manufacturing it.

摘要

An active matrix type liquid crystal display device comprises a plurality of row and column electrodes disposed on substrates (1) opposed to each other, and non-linear switching resistance elements (7) each disposed in each of picture element portions formed as a matrix at the intersections between both types or electrodes , whereby a liquid crystal composition is sealed between the substrates (1) and electrically driven for display. The non-linear resistor elements are Metal-Insulator- Metal (MIM) 2-terminal devices comprising Ta/TaOx/Cr layers (lower electrode metal/ insulator/ upper electrode metal), whereby the relative dielectric constant of the MIM's insulator is less compared to that of conventional MIM's using TaOx (x represents an optional number). By this measure the relative capacitance ratio between the liquid crystal and the nonlinear MIM resistor is considerably raised at more than 2 ,thus obtaining an image quality comparable with or superior to that of a TFT panel.