| 摘要 |
PURPOSE:To manufacture a uniformized target for forming a thin film of Bi3Fe5 O12 by subjecting a powder mixture of Bi oxide and Fe oxide to compacting and sintering at a specific temp. and then joining the resulting sintered compact to a copper sheet by the use of silver paste. CONSTITUTION:Respective powders of Bi2O3 of about 99.999% purity and alpha-Fe2O3 also of about 99.999% purity are mixed so that molar ratio is regulated to 3:5-3.5:4.5, which is compacted into a discoid state at >=about 600kg/cm<2> pressure and then sintered in the normal-pressure air at 800-840 deg.C for about 6hr. Subsequently, this sintered compact is crushed to minimum, to which the above compacting and sintering are repeatedly applied. The resulting sintered compact is worked into a parallel sheet and joined to an oxygen-free copper sheet of about 99.99% purity by silver paste, by which a sputtering target in which composition and structure are microscopically uniformized can be obtained. By this method, the target for use in manufacturing a thin film of ferromagnetic compound improved in magneto-optical effects can be manufactured. |
