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发明名称
FORMING METHOD OF WIRING
摘要
申请公布号
JPH02241031(A)
申请公布日期
1990.09.25
申请号
JP19890062708
申请日期
1989.03.15
申请人
SONY CORP
发明人
KURODA HIDEAKI
分类号
H01L21/768;H01L21/28
主分类号
H01L21/768
代理机构
代理人
主权项
地址
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