| 摘要 |
PURPOSE:To enable a laser-beam pattern generating device which generates patterns by using a laser beam to simultaneously generate a plurality of line patterns. CONSTITUTION:The device is provided with a light intensity modulating element which modulates the intensity of a laser beam, light diffracting angle modulating element 5 which deflects the laser beam, and an objective lens 11 through which the surface 12 of a sample is irradiated with the laser beam and the device is constituted in such a way that the laser beam emitted from a laser can be split into a plurality of beams and, after respectively modulating the intensity and angle of each split laser beam by means of the elements 4 and 5, different points on the surface of the sample 12 can be simultaneously irradiated with the split laser beams through the lens 11 so that patterns can be simultaneously formed. |
