PURIFICATION OF RAW GAS FOR THIN FILM FORMATION,申请号JP19890062396-传众专利搜索

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发明名称	PURIFICATION OF RAW GAS FOR THIN FILM FORMATION
摘要
申请公布号	JPH02240918(A)	申请公布日期	1990.09.25
申请号	JP19890062396	申请日期	1989.03.15
申请人	SUMITOMO ELECTRIC IND LTD	发明人	YOSHIDA ICHIRO
分类号	H01L21/205	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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